Electron Beam Assisted Chemical Etching of Single Crystal Diamond Chips (1st Report)
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چکیده
منابع مشابه
Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond.
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1996
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.62.448